Bird-technologies VIP System Manuel d'utilisateur télécharger pdf

The Bird VIP System is a tool for measuring voltage, current and the phase angle between these parameters

in complex applications. The VIP System is Bird Technologies’ solution to the semiconductor market to provide

more information than traditional VI probe instruments . Each calibrated system is comprised of a sensor

that attaches in-situ in the RF feed line, a receiver that performs the data conversion and communicates to

your workstation, and a data cable that connects the sensor to the receiver.

Using a streamlined architecture, the VIP System is able to measure and report voltage, current, and phase

angle at multiple fundamental, harmonic and intermodulation frequencies. With this data, power and

impedance are calculated at each frequency, giving users the ability to identify small discrepancies that

may make the difference between a successful and a failed process. This makes the VIP System an incredible

tool for repeating high precision processes.

System

PROBLEMS } SOLUTIONS

Simultaneous Measurements of Multiple RF Generators

} Up to 3 fundamental frequencies can be measured

simultaneously with a single VIP system. This feature aids

in developing repeatable processes, troubleshooting

components and identifying process drifts.

Complex Waveform Plot

} Proprietary architecture maintains correct phase angle

information between the fundamental and harmonics.

This feature helps to ensure that a repeatable and identical

RF spectrum is delivered to the wafer.

APPLICATIONS

Chamber to Chamber Matching.

Waveform Reconstruction enables chamber comparisons to

identify large and small changes.

Impedance Matching can reveal problems such as poor RF

connections, worn electrodes and changes in the process gas

mixture.

Harmonic Levels up to 150 MHz are available for analysis.

V, I, Phase and Delivered Power Comparison.

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The Bird VIP System is a tool for measuring voltage, current and the phase angle between these parametersin complex applications. The VIP System is B

VIP SystemPARAMETER SPECIFICATIONSFrequency Range 307 kHz - 150 MHz (Sensor Dependent)Frequency Resolution 100 HzFrequency Accuracy ± 1 kHzHarmonics

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Bird-technologies VIP System Manuel d'utilisateur